Ultra-flat Silicon Wafers and Etalons
By utilizing state-of-the-art metrology, wafer-based optical fabrication and our advanced ion-beam-sputtering (IBS) coatings, we have been able to repeatedly produce ultra-flat, optical grade silicon components. Thickness measurements taken with our laser-based, NIST-traceable SW1500 metrology system confirm total thickness variations (TTV) as low as 11 nm across a 68 mm diameter—a parallelism of less than 0.05 arcseconds!
• Local slope error <0.1 µm/inch
• As low as 20/10 surface quality over clear aperture >90%
• Diced dimensions of 1.5 mm to 2.5 mm ±0.050 mm
Solid silicon etalons are often used as tunable dispersion compensators and as optical frequency discriminators. Designers can achieve rapid tuning and uniform heat distribution by controlling the transmission properties of the etalon through refractive index modulation. PPC has spent considerable effort working with our suppliers to obtain true “optical grade” material for these and other applications in the near IR, including telecommunications and optical spectroscopy
Custom etalons, filters and wafers are available, coated or uncoated with 20/10 surface quality in sizes from 1.5 × 1.5 mm² to 100 mm diameter.
Nominal thickness 830 microns.
Thickness scan over X and Y.